美国 Semiconductor Interna—tional 的 Eric Bogatin 撰文对 MEMS 器件,尤其是 RF MEMS 开关的市场进行了预测。著者认为 MEMS 技术虽然可以说尚处于开发初始阶段,但匆容置疑的是它具有着巨大的发展潜力。据 In-Stat Group 预测和统计,2001年 MEMS 器件的市场规模为40亿美元,其中显 Eric Bogatin of Semiconductor Interna- tional of the United States made a prediction on the market of MEMS devices, especially RF MEMS switch. The author believes that although MEMS technology can be said that is still in the initial stage of development, but there is no doubt that it has great potential for development. According to In-Stat Group’s forecast and statistics, the market size of MEMS devices in 2001 was 4 billion U.S. dollars, of which,