亚原子测量机的进展

来源 :纳米技术与精密工程 | 被引量 : 0次 | 上传用户：wangjie198811

【摘要】

：

为使工程纳米技术成为一个实用学科,需要能在亚原子量级上进行定位与制造的机器.笔者已对它的结构、马达配电原理、干涉技术等细节进行了研究.用网格板对机器进行自标定,设计

【作者】

：

Hocken Robert J

【机构】

：

美国北卡罗莱纳大学夏洛特分校精密计量中心

【出处】

：

纳米技术与精密工程

【发表日期】

：

2004年期

【关键词】

：

超精控制磁悬浮纳米技术 ultra-precision control magnetically-suspended nanotechnology

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为使工程纳米技术成为一个实用学科,需要能在亚原子量级上进行定位与制造的机器.笔者已对它的结构、马达配电原理、干涉技术等细节进行了研究.用网格板对机器进行自标定,设计了一种光学显微镜来探测网格板的特征线.显微镜利用调制发光二极管作为光源,有两个光学成像通道.一个是由双狭缝构成精密测量线条位置,另一个用摄像机直接目视观察.用锁相放大器解调狭缝后的光电二极管电信号.实验表明,网格板线条交点定位检测的重复性标准差约为1 nm.用新开发的一种算法求出了工作台的误差分布图.

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亚原子测量机的进展

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