针对制作溶胶 凝胶 (sol gel)微光学元件的需要 ,对溶胶 凝胶浸渍提拉成膜过程中膜厚、均匀性等成膜特性进行了仔细考察。对于室温干燥情况 ,提拉成膜厚度与提拉速度的经验关系为 :低速时膜厚与提拉速度呈 1 2次幂关系 ;高速时则偏离以上关系 ,且随速度的增大 ,膜厚增加缓慢。对成膜过程的分析表明 ,挥发过程对溶胶 凝胶提拉成膜厚度的影响是重要的 In view of the need of making sol-gel micro-optical elements, the film-forming properties such as film thickness, uniformity and so on during the film-forming process of sol-gel impregnation are examined carefully. For the case of room temperature drying, the empirical relationship between the film thickness and the pulling speed is as follows: the film thickness and the pulling speed are in the relationship of 1 2 power at low speed, and deviate from the above relationship at high speed, and with the increase of speed, the film thickness Increase slowly. The analysis of the film formation process shows that the influence of the volatilization process on the sol-gel film thickness is important