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利用Lambda-900分光光度计,在波长为310~1250nm范围内测量了离子束溅射沉积不同厚度纳米Mo膜的反射率和透射率。选定波长为310nm,350nm,400nm,500nm,550nm,632nm,800nm,1200nm时对薄膜的反射率、透射率和吸收率随膜厚变化的关系进行了讨论。实验结果显示,纳米Mo膜的光学特性有明显的尺寸效应。提出将薄膜对光波长为550nm时的反射率和透射率随Mo膜厚度变化关系的交点对应的厚度作为特征厚度,该厚度可认为是纳米Mo膜生长从不连续膜进入连续膜的最小连续膜厚。利用原子力显微镜(AFM)观测膜厚在15.76nm时的表面形貌,此时表面形貌已呈现连续膜的特征。
The Lambda-900 spectrophotometer was used to measure the reflectivity and transmittance of Mo films deposited by ion beam sputtering with different thickness in the range of 310 ~ 1250 nm. The relationship between the reflectivity, transmittance and absorptance of the thin films with the selected wavelength of 310nm, 350nm, 400nm, 500nm, 550nm, 632nm, 800nm and 1200nm is discussed. The experimental results show that the optical properties of nano-Mo film have obvious size effect. The thickness of the film corresponding to the intersection point of the reflectivity and the transmittance with the thickness of the Mo film when the wavelength of the light is 550 nm is taken as the characteristic thickness which can be considered as the minimum continuous film of the nano Mo film growing from the discontinuous film into the continuous film thick. Atomic force microscopy (AFM) was used to observe the surface morphology at a film thickness of 15.76 nm. At this time, the surface morphology showed a continuous film characteristic.