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The garnet-type Li_6La_3ZrTaO_(12)(LLZT) solid electrolyte films were fabricated by aerosol deposition(AD)method.Ball-milled LLZT powder with a cubic garnet structure and a particle size of 1-2 urn was used as raw material and deposited directly on a SUS316L or a glass substrate via impact consolidation.As-deposited LLZT film has a cubic garnet structure but contains Li_2CO_3 and La_2Zr_2O_7 phases.SEM observation revealed that the film consists of LLZT particles fractured into submicron size.The impurity phase formation during AD process was caused by the local heating by the collision between LLZT particles and deposition surface and reaction with CO_2.The Li~+ ion conductivity of LLZT film was estimated to be 0.24 × 10~(-5)S cm~(-1) at room temperature.Electronic conductivity of LLZT film was confirmed to be around 10~(-12) S cm~(-1),indicating the dominant Li~+ ion conduction of LLZT film.
The garnet-type Li_6La_3ZrTaO_ (12) (LLZT) solid electrolyte films were fabricated by aerosol deposition (AD) method. Ball-milled LLZT powder with a cubic garnet structure and a particle size of 1-2 urn was used as raw material and deposited directly on a SUS316L or a glass substrate via impact consolidation. As-deposited LLZT film has a cubic garnet structure but contains Li_2CO_3 and La_2Zr_2O_7 phases. SEM observation revealed that the film consists of LLZT particles fractured into submicron size. The impurity phase formation during AD process was caused by local heating by the collision between LLZT particles and deposition surface and reaction with CO_2. Li ~ + ion conductivity of LLZT film was estimated to be 0.24 × 10 -5 S cm -1 at room temperature. Electronic conductivity of LLZT film was confirmed to be around 10 ~ (-12) S cm -1, indicating the dominant Li ~ + ion conduction of LLZT film.