This study investigated indium tin oxide (ITO) films that were deposited on fluororesin-46 (F46) and polyimide (PI) transparent flexible substrates by a DC magnetron sputtering system.The optical properties of ITO films on F46 and PI including transmittance and reflectance in visible,near-infrared,and infrared spectral regions were obtained,and the surface morphology,and optical and electrical properties of ITO/F46 and ITO/PI after vacuum ultraviolet irradiation were investigated.The results showed that the mean transmittances of ITO/F46 and ITO/PI decreased and the sheet resistance increased after the irradiation,and these effects were mainly attributed to the greater surface roughness and crystal defects caused by the irradiation.