垂直腔面发射激光器,目前在光互连中有着越来越广泛的应用。是一种波长为850 nm的多模激光器,其光输出截面达50μm×50μm,为了更好的匹配该器件,需要研制大截面多模脊形波导,并且为了满足芯片间光互连的需求,对互连波导长度具有较高的要求。通过改进制备工艺,研制了直线长度为21 cm的多模聚硅氧烷脊形波导,并成功完成了通光实验;搭建了一套对波导完全无损伤的测量系统,实现了对多模脊形光波导的无损伤测量,测得损耗平均值为约0.18 dB/cm,并利用传统的截断法进行了验证。此外,该系统还可以用于不可见光波段的耦合对准。 Vertical cavity surface emitting lasers, in the optical interconnection has been more and more widely used. Is a 850 nm multimode laser with a light output cross section of 50 μm × 50 μm. In order to better match the device, a large cross-section multimode ridge waveguide needs to be developed. In order to meet the requirements of the inter-chip optical interconnection, Interconnect waveguide length has higher requirements. A multi-mode polysiloxane ridge waveguide with a linear length of 21 cm was developed by improving the preparation process. The light-passing experiment was successfully completed. A measuring system with no damage to the waveguide was built, The average optical loss was measured at about 0.18 dB / cm and was verified using conventional truncation methods. In addition, the system can also be used for coupling alignment in the non-visible band.