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采用超声喷雾热分解法在石英衬底上以醋酸锌水溶液为前驱体,以硝酸银水溶液为Ag掺杂源生长了Ag掺杂ZnO(ZnO:Ag)薄膜.研究了衬底温度对所得ZnO:Ag薄膜的晶体结构、电学和光学性质的影响规律.所得ZnO:Ag薄膜结构良好,在室温光致发光谱中检测到很强的近带边紫外发光峰,透射光谱中观测到非常陡峭的紫外吸收截止边和较高的可见光区透过率,表明薄膜具有较高的晶体质量与较好的光学特性.霍尔效应测试表明,在500℃下获得了p型导电的ZnO:Ag薄膜,载流子浓度为5.30×1015cm-3,迁移率为6.61cm2·V-1s-1.
Ag doped ZnO (ZnO: Ag) thin films were grown by ultrasonic spray pyrolysis on a quartz substrate using zinc acetate aqueous solution as precursor and silver nitrate aqueous solution as Ag dopant.The effect of substrate temperature on the ZnO: Ag films.The results show that the obtained ZnO: Ag films have a good structure, strong near-band ultraviolet light-emitting peak is detected in the room temperature photoluminescence spectrum, and the very steep ultraviolet Absorption cut-off edge and high transmittance of the visible region, indicating that the film has a higher crystal quality and better optical properties.Hall effect test showed that at 500 ℃ p-type conductive ZnO: Ag film was obtained The concentration of the target is 5.30 × 1015cm-3 and the mobility is 6.61cm2 · V-1s-1.