在惯性约束核聚变装置中,为了实现高精度光束焦点位置调整的目的,采用了基于高精度自动调整反射镜进行光束准直引导的方法,进行了理论分析和实验验证,取得了不同驱动方式下电动反射镜的调整精度数据.结果表明:柔性铰链连接直线微位移驱动机构和旋转轴框,能够有效地消除摩擦和间隙等对精度的影响,该电动反射镜能够在±15 mrad的运动范围内实现1μrad激光光束指向调整分辨率,满足了神光-Ⅲ装置的技术要求。这一结果对大型激光器中高精度光束调整系统的设计是有帮助的。 In the inertial confinement fusion device, in order to adjust the focal position of the high-precision beam, a method of beam alignment and guidance based on high-precision automatic adjustment of the reflecting mirror is adopted. The theoretical analysis and experimental verification are carried out. Different driving modes The results show that the flexible hinge connects the linear micro-displacement drive mechanism and the rotating shaft frame, which can effectively eliminate the influence of friction and clearance on the accuracy. The electric mirror can move within the range of ± 15 mrad Achieve 1μrad laser beam pointing to adjust the resolution to meet the SG-Ⅲ device’s technical requirements. This result is helpful for the design of high precision beam steering systems in large lasers.