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当前在电子探针X射线显微分析仪和扫描电子显微镜上普遍配备的直进式X射线光谱仪,由于构造复杂和空间运动轨迹特殊,其机械精度的测试是个困难的问题。本文提出能定量测量机械精度的自准直回转测定法,介绍有关原理及相应的实验布置并附有测试实例。
The current straightforward X-ray spectrometer currently available on electron probe X-ray microanalysers and scanning electron microscopes is a difficult problem due to its complex structure and special spatial motion trajectory. This paper presents a self-aligning gyroscope method that can quantitatively measure the mechanical precision. The principle and the corresponding experimental arrangement are introduced with the test examples.