We have shown that, in contrast to the results in the literature, the Bragg peak intensity of Ni80Fe20/Cu superlattices is enhanced at the incident x-ray energy slightly higher than the absorption edge of the heavier element (Cu). The atomic density at Ni80Fe20/Cu interface was analysed by the diffraction anomalous fine structure technology with the incident angle of x-ray fixed at the first Bragg peak. Our results demonstrate the epitaxy growth of Ni80Fe20/Cu superlattices. Upon annealing, the epitaxity of Ni80Fe20/Cu multilayers becomes poor but the local crystallinity in each layer is improved.