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介绍了太阳电池用CuInS_2薄膜一步共沉积法和分步电沉积法的工艺特点,重点讨论了一步法共沉积CuInS_2薄膜的工艺因素,包括电解液的组成(如主盐浓度、络合剂、添加剂和附加盐等)、电沉积工艺规范(如沉积电位、温度、热处理等)等方面。并详细地分析了这些因素对电沉积CuInS_2薄膜性能的影响,据此提出了目前实验室研究中存在的问题和今后的研究方向。
The process characteristics of CuInS_2 thin film for solar cells by one-step co-deposition method and step-by-step electrodeposition method were introduced. The technological factors of one-step co-deposition of CuInS_2 thin films were discussed, including the composition of the electrolyte (such as main salt concentration, complexing agent, And salt, etc.), electrodeposition process specifications (such as deposition potential, temperature, heat treatment, etc.) and so on. The influences of these factors on the properties of electrodeposited CuInS_2 thin films were analyzed in detail. Based on this, the existing problems in the laboratory research and the future research directions were proposed.