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本文提出一种双狭缝式光触针表面轮廓传感器,并采用激光束光学方法计算其特性及各结构参数与特性的关系.实验研究所得到的特性曲线和理论分析是一致的.本文还给出了对矩形轮廓及三角形轮廓样板的实测结果.
In this paper, a double-slit stylus profile sensor is proposed, and the characteristics of the double-slit stylus stylus profile sensor are calculated by laser beam optics method. The relationship between the structure parameters and the characteristics is obtained. The experimental results obtained are consistent with the theoretical analysis Out of the rectangular outline of the contours and triangles of the measured results.