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TiN纳米多层薄膜/涂层由于其高的硬度、耐磨性和断裂韧性等优点在精密刀具和模具方面备受青睐。近些年TiN纳米多层薄膜在力学性能方面的研究主要集中于超硬性能、摩擦磨损性以及断裂韧性三个方面。本文分别从膜层间作用关系、微观结构以及裂纹扩展机制等角度讨论多层构造对薄膜的超硬性能、耐磨性性以及断裂韧性的影响机理。提出超硬机理指导薄膜制备,残余应力影响裂纹的双重效应,建立多层微观结构与宏观力学性能映射关系三个研究方向,以期为研究TiN纳米多层薄膜力学性能提供新思路。另外,简单介绍了多层结构能够提升薄膜的高温抗氧化性和耐腐蚀性,并展望了TiN纳米多层膜的发展方向。
TiN nano-multilayer films / coatings are favored for precision tools and molds due to their high hardness, wear resistance and fracture toughness. In recent years, TiN nano-multilayer film in the mechanical properties of the research focus on the superhard performance, friction and wear and fracture toughness in three areas. In this paper, the mechanism of multi-layer structure on the superhardness, wear resistance and fracture toughness of the films are discussed from the interaction between the films, the microstructure and the crack propagation mechanism. The dual effect of superhard mechanism guiding film preparation and residual stress affecting crack formation is proposed. Three research directions of multi-layer microstructure and macroscopic mechanical property mapping are established, in order to provide new ideas for the study of mechanical properties of TiN nano-multilayered films. In addition, the multi-layer structure is briefly introduced to improve the high temperature oxidation resistance and corrosion resistance of the film, and the development direction of the TiN nano multilayer film is also prospected.