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研究用金属铟(纯度99．99％)和锡酸钠为原料制备In2O3·Sn2(ITO)复合粉末的工艺过程。在In3+浓度150g／L,(NH4)CO3浓度200g／L,沉淀温度323-343K,滴速1drop／s,pH=6-7,强力搅拌,烘干温度353-373K,焙烧温度973-1173K等适宜条件下制备出ITO超细复合粉末。产品平均粒径0．05μm左右,颗粒为球形,分布较均匀,流动性好,适于制备高密度的ITO靶材。
The process of preparing In2O3 · Sn2 (ITO) composite powder with indium metal (purity of 99.99%) and sodium stannate as raw materials was studied. Under the conditions of concentration of In3 + 150g / L, concentration of (NH4) CO3 200g / L, precipitation temperature 323-343K, dropping rate 1drop / s, pH = 6-7, intensive stirring, drying temperature 353-373K, calcination temperature 973-1173K Suitable conditions to prepare ITO ultrafine composite powder. The average particle size of the product is about 0.05μm, the particles are spherical, the distribution is more uniform, and the fluidity is good. It is suitable for preparing high density ITO target material.