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介绍了一种新型的毫米波椭偏法,可以用来测量介质材料的介电常数和厚度。通过分析入射波波长和入射角的不同取值对实验结果的影响,给出了入射波波长和入射角的取值范围,同时对介电常数、厚度与椭偏参数之间的关系进行了数值模拟研究。研究结果表明,由椭偏参数经数值计算反演出的介电常数、厚度通常会出现多值的情况。但对大多数的介质薄膜而言,却可以通过该方法求出唯一确定的介电常数与厚度,表明了毫米波椭偏法在介质参数测量上的可行性。
A new type of millimeter wave ellipsometry is introduced, which can be used to measure the dielectric constant and thickness of dielectric materials. By analyzing the influence of different values of incident wavelength and incident angle on the experimental results, the range of incident wave wavelength and incident angle is given, and the relationship between dielectric constant, thickness and ellipsometric parameters is also given Simulation study. The results show that the multi-valued thickness usually appears when the ellipsometric parameters are numerically calculated. However, for most of the dielectric thin films, the uniquely determined permittivity and thickness can be obtained by this method, indicating the feasibility of the millimeter wave ellipsometry in measuring the medium parameters.