论文部分内容阅读
为实现对超快激光诱导金属钛改变趋势的定性控制及材料改变范围的定量控制,开展了飞秒和皮秒脉冲激光分别与金属钛烧蚀的对比实验研究。随后使用激光扫描共聚焦显微镜、X射线光电子能谱和透射电子显微镜分别就激光脉冲时间宽度变化对被烧蚀金属钛的表面形貌与烧蚀深度、化学成分、微结构状态的影响规律进行了分析。研究发现:随着激光脉冲时间宽度从飞秒增加到皮秒量级,被烧蚀金属钛的表面形貌质量逐渐变差,最终烧蚀产物的化学成分愈加复杂,微结构状态的无定形化程度也随之增加。最终认为伴随激光脉冲时间宽度增加,金属钛中热累积效应的增强而造成被烧蚀材料内部更为严重的热与机械损伤是导致上述实验现象产生的主要原因。
In order to achieve the qualitative control of the tendency of ultra-fast laser induced titanium and the quantitative control of the range of material changes, comparative experiments on femtosecond and picosecond laser ablated with titanium were carried out respectively. Subsequently, the effects of laser pulse duration variation on the surface topography, ablation depth, chemical composition and microstructure of the ablated titanium were investigated by laser scanning confocal microscopy, X-ray photoelectron spectroscopy and transmission electron microscopy, respectively analysis. The results show that as the laser pulse duration increases from femtosecond to picosecond order, the quality of the surface morphology of the ablated titanium gradually deteriorates, and the chemical composition of the final ablated product becomes more complicated. The microstructure is amorphous The degree also increases. It is concluded that the more severe thermal and mechanical damage in the ablated material resulted from the increase of the laser pulse time width and the increase of the heat accumulation in the titanium metal, which is the main reason for the above experimental phenomena.