【摘 要】
：
介绍了一种新的硅微陀螺仪闭环驱动方案.该方案采用推挽驱动方式,即在陀螺仪活动梳齿两边的驱动电极上分别施加同相交流电压和反相直流电压.对驱动性能进行了分析,结果表明驱
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介绍了一种新的硅微陀螺仪闭环驱动方案.该方案采用推挽驱动方式,即在陀螺仪活动梳齿两边的驱动电极上分别施加同相交流电压和反相直流电压.对驱动性能进行了分析,结果表明驱动力矩的频段与噪声信号频段是分离的.在此基础上,利用锁相技术满足正弦自激振荡的相角和增益条件,建立环路的自激振荡,实现了闭环控制.同时在闭环回路中利用正弦自激振荡的相角条件和锁相环的鉴相特性,消除了驱动信号对驱动检测信号的同频干扰,抑制了环路中的噪声干扰.试验结果显示,驱动电压的频率和幅度的变化量均在0.02%以下,实现了驱动稳幅稳频的目的,陀螺仪精度和可靠性得到了显著提高.
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