离子渗金属中,工件表层合金贫化主要是由于离子轰击在工件表层造成一个严重的畸变层,畸变层原子具有高的扩散系数而非畸变层原子具有低的扩散系数,结果使交界区出现原子富集;同时在畸变层存在畸变梯度,这一梯度的存在支持这样的富集。离子轰击的溅射作用和溅射衰减也促使出现内层峰。提高源极电压和电流,增加单位时间内沉积到工件表面的金属原子数,或渗后进行高温扩散退火,都可以减轻和消除贫化。 In ion-permeable metals, the depletion of the alloy surface is mainly due to the ion bombardment in the surface of the workpiece to cause a serious distortion layer, the distortion layer atoms have a high diffusion coefficient and non-distortion layer atoms have a low diffusion coefficient, the result of the junction area atoms Enrichment; at the same time there is a distortion gradient in the distortion layer, the existence of this gradient to support such enrichment. Sputtering by ion bombardment and sputtering decay also prompted the appearance of an inner peak. Increasing source voltage and current, increasing the number of metal atoms deposited on the surface of the workpiece per unit time, or post-infiltration for high temperature diffusion annealing can both reduce and eliminate depletion.