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1. 前言热电型红外传感器因其灵敏度与波长无关,并具有在室温下可工作的特性,广泛应用于自动装置,环境监视,温度控制,防灾防盗等领域。特别是在长波波段,灵敏度也很高,可作室温附近物体的热探测用。通常,用作红外传感器的热电材料,其性能指数以F_v=γ/cv·ε_r和F_m=γ/cv√ε_r ttanδ表征。F_v为表征电压灵敏度R_v 的性能参数、F_m 为表征噪声的性能参数,主要为tanδ噪声时的探测率D~*,γ是热电系数,c_v 是体积比热,ε_r 是介电常数,t 是材料厚度。因而要求γ大,c_v,ε_r,tanδ小。另外,就D~*而言薄的材料是有利的。作为热电
1. Introduction Thermoelectric infrared sensors are widely used in automatic devices, environmental monitoring, temperature control, disaster prevention and anti-theft because of their sensitivity to wavelengths and their workability at room temperature. Especially in the long-wave band, the sensitivity is also high, for objects near the room temperature detection with heat. In general, thermoelectric materials used as infrared sensors whose performance indices are characterized by F_v = γ / cv · ε_r and F_m = γ / cv√ε_r ttanδ. F_v is the performance parameter characterizing the voltage sensitivity R_v, F_m is the performance parameter characterizing the noise, mainly the detection rate D ~ * when tan δ noise, γ is the thermoelectric coefficient, c_v is the volume specific heat, ε_r is the dielectric constant, t is the material thickness. Thus requiring large γ, c_v, ε_r, tanδ small. In addition, thin materials are advantageous for D ~ *. As thermoelectric