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利用球 -盘摩擦试验装置考察了大气环境下 YBa2 Cu3O7薄膜和多晶硅薄膜同蓝宝石球及钢球对摩时的摩擦行为 ,并用原子力显微镜对其表面形貌进行了分析 .结果表明 :表面相对较粗糙的 YBa2 Cu3O7薄膜与蓝宝石球对摩时的摩擦系数低于多晶硅薄膜 /蓝宝石球的摩擦系数 ;而 2种薄膜与钢球对摩时的摩擦系数相当 ;YBa2 Cu3O7薄膜与蓝宝石球对摩时的启动摩擦非常稳定 ,而多晶硅薄膜的启动摩擦很不稳定 ;与钢球对摩时两者的启动摩擦则都比较稳定 .对 YBa2 Cu3O7薄膜的磨损表面形貌分析研究表明 ,其表面突出物结合疏松 ,容易从基体表面磨损脱落 .
The friction behavior of YBa2 Cu3O7 thin films and polycrystalline silicon thin films on sapphire balls and steel balls was studied by ball-plate friction test device and the surface morphology was analyzed by atomic force microscopy.The results showed that the surface was relatively rough The friction coefficient of YBa2 Cu3O7 film and sapphire ball is lower than the friction coefficient of polycrystalline silicon film / sapphire ball; while the friction coefficient of the two kinds of film and steel ball is the same as that of YBa2 Cu3O7 film and sapphire ball; Friction is very stable, but the start-up friction of polycrystalline silicon film is very unstable, and both of them are relatively stable when they are rubbed against steel balls.Analysis of the wear surface morphology of YBa2 Cu3O7 films shows that the surface projections are loose, Easy to wear and tear off from the substrate surface.