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透明导电氧化物（TCO）薄膜In2O3:Sn和SnO。2:F都已经发展成熟,分别大规模应用于平板显示器和建筑两大领域。最近几年,TCO薄膜的研究又进入了一次复兴时期,研究和开发出几类具有明显特色的新型TCO薄膜。ZnO基TCO薄膜有替代In2O3:Sn薄膜的趋势;多元TCO薄膜材料可以调整其性能来满足某些特殊应用的需求;具有高载流子迁移率的In2O3:Mo薄膜为进一步提高TCO薄膜的性能打开了一条新路;真正的p型TCO薄膜为制造透明电子元器件迈出了第一步。
Transparent Conductive Oxide (TCO) Films In2O3: Sn and SnO. 2: F are already mature, respectively, large-scale application in flat panel displays and two major areas of construction. In recent years, TCO film research has entered a period of rejuvenation, research and development of several types of distinctive new TCO film. ZnO-based TCO films tend to replace In2O3: Sn films; multiple TCO film materials can be tailored to meet the needs of specific applications; In2O3: Mo films with high carrier mobility open to further enhance the performance of TCO films A new path; the real p-type TCO film is the first step in making transparent electronic components.