早在80年代,日本东京大学林辉教授曾对微型机械作了一个基本定义:1毫米至10毫米的为小型机械,10微米至1毫米为微型机械,10纳米至10微米为超微型机械,统称为微型机械。微型机械的体积可以做到微米级甚至亚微米级,重量轻至纳克,加工精度达微米、纳米级。由于微型机械体积小,受热膨胀、噪声和挠曲等因素影响小,所以能保持稳定的性能,维持稳定的工作。显然,要做成这样小的微型机 As early as the 1980s, Professor Lin Hui of Tokyo University gave a basic definition of micromechanics: 1 millimeter to 10 millimeters for small machines, 10 micrometers to 1 millimeter for micromechanics and 10 nanometers to 10 micrometers for ultramicrotomes, Collectively referred to as micro-machinery. Micro-mechanical volume can be micron or sub-micron level, light weight to nanograms, processing accuracy of microns, nanoscale. Due to its small size, thermal expansion, noise and deflection, it is possible to maintain stable performance and maintain stable operation. Obviously, to make such a small microcomputer