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介绍了一种双焦干涉球面扫描轮廓仪，该仪器利用计算机及自动控制系统对曲率半径从±5mm～±30mm的球面进行扫描驱动及采样，并将球面轮廊信号通过A/D转换及数据处理后显示打印表面轮廓参数。整个系统功能齐全。
A bifocal interferometric spherical scanning profiler is introduced. The instrument uses a computer and automatic control system to scan and sample the spherical surface with the radius of curvature from ± 5mm to ± 30mm, and the spherical and the corridor signal are converted by A / D conversion and data After processing, the print surface profile parameters are displayed. The entire system is fully functional.