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形状记忆合金 (SMA)薄膜因其特有的形状记忆合金效应、超弹性行为以及薄膜材料所特有的优越性能 ,而在微机电系统中的微驱动器和微传感器方面极具应用潜力。本文主要介绍了以TiNi基合金为主的形状记忆合金薄膜在微驱动器和微传感器上的国内外应用性研究现状 ,并展望了其未来的发展趋势。
Shape memory alloy (SMA) films have potential applications in micro-actuators and micro-sensors in micro-electromechanical systems because of their unique shape memory alloy effect, super-elastic behavior and the unique properties of thin-film materials. In this paper, the current status of the applications of TiNi-based shape memory alloy thin films on micro-actuators and micro-sensors at home and abroad is introduced, and their future development trends are also discussed.