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化学气相沉积ＺｎＳ是一种脆性材料，其硬度由晶粒尺寸控制，符合Ｈａｌ－Ｐｅｔｃｈ关系，而对晶体缺陷微孔不敏感；断裂韧性则同时受晶粒尺寸及微孔的控制。沉积温度是决定ＺｎＳ晶粒大小的主要因素，同时也影响ＺｎＳ中的微孔数量；Ｈ２Ｓ／Ｚｎ摩尔流量比、沉积速率则仅影响ＺｎＳ中的微孔及微裂纹的存在与否。
Chemical vapor deposition of ZnS is a brittle material, the hardness controlled by the grain size, in line with the Hal-Petch relationship, but not sensitive to crystal defects micropores; fracture toughness at the same time by the grain size and micropore control. The deposition temperature is the main factor determining the grain size of ZnS and also affects the number of micropores in ZnS. The molar flow ratio of H2S / Zn and the deposition rate only affect the existence of micropores and microcracks in ZnS.