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用水热盐溶液水解法可合成含有单斜相晶态纳米ＺｒＯ２颗粒的ＺｒＯ２溶胶体用匀胶法制备的纳米 ＺｒＯ２薄膜厚度约 １６０ｎｍ，折光率为 １．５６．纳米 ＺｒＯ２薄膜表面质量良好，无表面裂隙，台阶仪研究表明薄膜表面粗糙度算术差Ｒａ＝２．７ｎｍ，均方根差Ｒｑ＝３．７ｎｍ．以 ＺｒＯ２为高折射率膜层，碱催化的溶胶凝胶 ＳｉＯ２为低折射率膜层，制备了ＳｉＯ２／ＺｒＯ２多层高反射率薄膜，１０周期的 ＳｉＯ２／ＺｒＯ２多层膜系，在 １．０６μｍ波段处透过率为 １％；薄膜表面抗激光损伤阈值约 １５Ｊ／ｃｍ２（１．０６μｍ， ２．５ｎｓ高功率激光作用下）．
Hydrothermal salt solution hydrolysis method can be synthesized with monoclinic ZrO2 nano-ZrO2 particles ZrO2 particles prepared by spin coating nanocrystalline ZrO2 film thickness of about 160nm, refractive index of 1.56. The surface quality of the nanometer ZrO2 thin film is good, there is no surface crack, and the research on the step instrument shows that the arithmetic difference of the film surface roughness is Ra = 2.7nm and the root mean square difference Rq is 3.7nm. ZrO2 as high refractive index layer and alkali-catalyzed sol-gel SiO2 as low refractive index layer, SiO2 / ZrO2 multilayer high reflectivity thin film and 10 cycles SiO2 / ZrO2 multilayers were prepared. The transmittance at the band is 1%. The anti-laser damage threshold of the film surface is about 15J / cm2 (1.06μm, 2.5ns high-power laser).