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微定位器是精密加工、纳米技术的重要组成部分,柔性机构则是微定位器的核心部件。本文利用有限元分析软件ANSYS对传统的基于柔性铰链的柔性机构和一种新的基于柔性悬臂梁的柔性机构进行了对比分析。分析结果表明,在相同的外形尺寸和作用力下,新柔性机构的输出位移增加了一倍,最大应力减少了23%。最后给出了一种新的基于柔性悬臂梁的柔性机构的设计方法,该方法可以减少设计参数并大大减少计算量。
Micro-positioner is a precision machining, an important part of nanotechnology, flexible mechanism is the core component of the micro-locator. In this paper, the finite element analysis software ANSYS is used to compare the traditional flexible hinge-based flexible mechanism and a new flexible cantilever-based flexible mechanism. The analysis results show that with the same overall dimensions and force, the output of the new flexible mechanism has doubled and the maximum stress has been reduced by 23%. Finally, a new design method of flexible mechanism based on flexible cantilever is given, which can reduce the design parameters and greatly reduce the computational cost.