针对三倍频光学元件后表面的损伤修复形貌,分别采用时域有限差分法(FDTD)和瑞利-索末菲(R-S)衍射积分法,来模拟不同形貌下元件修复区域内以及其后续的光场分布。结果表明,当修复坑截面轮廓线端点切线与光束传播方向夹角大于70°时,元件内部光强极大值小于1.66,修复效果优于其他角度。夹角为70°、宽200μm的抛物面型、圆锥型和圆台型凹坑的后续光强极大值小于1.46。但是当修复坑宽度较大如达到1mm时,圆台型凹坑的后续光强极大值高达9.31,且作用区间长。因此,考虑实际激光修复工艺的难度,夹角大于70°的圆锥型凹坑是石英元件后表面损伤修复的首选形貌。 Aiming at the damage repair morphology of the back surface of the triplet optical element, the time-domain finite difference method (FDTD) and the Rayleigh-Sommerfeld (RS) diffraction integral method were used respectively to simulate the effects of different shapes on the repaired areas Subsequent light field distribution. The results show that when the angle between the tangential line of end point of the repairing pit and the propagation direction of the beam is greater than 70 °, the maximum internal light intensity of the component is less than 1.66, which is better than other angles. Parabolic, conical and frusto-conical pits with an included angle of 70 ° and a width of 200 μm have a maximum subsequent light intensity of less than 1.46. However, when the width of the repair pit is large, for example, 1 mm, the follow-up light intensity maximum of the truncated cone-shaped pit reaches as high as 9.31 and the action interval is long. Therefore, taking into account the difficulty of the actual laser repair process, conical dimples with an included angle greater than 70 ° are the preferred topography for repairing the posterior surface of quartz components.