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本文以中等尺寸000级平板为研究对象,采用双频激光测量系统的直线度测量部件进行平面度测量,分析计算了这一测量方法的测量不确定度,并进行了实际测试。理论分析和测试结果表明,这一方法的测量不确定度及其重复采样点偏差值的重合度可以满足中等尺寸000级平板的测量要求
In this paper, a medium-sized flat panel is taken as the research object. The flatness measurement is carried out by using the straightness measurement unit of dual-frequency laser measurement system. The measurement uncertainty of this measurement method is analyzed and calculated and the actual test is carried out. The theoretical analysis and test results show that the coincidence degree between the measurement uncertainty of this method and the repetitive sampling point deviation value can meet the measurement requirements of the medium size 000 level plate