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介绍一种全息光刻技术的基本原理 ,全息掩模复位精度的影响 ,全息光刻技术的优点及基本应用 ,并对全息光刻系统的设计考虑作了详细介绍 ,并给出部分实验结果
The basic principle of holographic lithography, the effect of holographic mask reset precision, the advantages and basic applications of holographic lithography are introduced. The design considerations of holographic lithography system are introduced in detail, and some experimental results are given