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从逆扩散型检漏仪的检漏过程出发,通过实验讨论分子泵转速对氦质谱检漏仪检测结果的影响,并分析产生这种结果的原因。
Based on the leak detection process of the anti-diffusion leak detector, the influence of the molecular pump rotational speed on the detection results of the helium mass spectrometer leak detector is discussed through experiments, and the reason for the result is analyzed.