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对电荷耦合器件(CCD)片上放大器直流输出电压的主要影响因素进行了研究,通过对不同源漏工艺、不同栅下注入剂量工艺条件对直流输出的影响分析,指出有效沟道长度和放大管栅下注入是CCD片上放大器直流输出电压的主要影响因素。
The main influencing factors of the DC output voltage of the on-chip amplifier in charge-coupled device (CCD) are studied. By analyzing the influence of different source and drain processes and different implantation process parameters on the DC output, the effective channel length and the amplification of the gate The next injection is the main factor affecting the DC output voltage of the on-chip amplifier in the CCD.