本文首先介绍以锶谱线的ΔS值为判据对等离子体最佳化所用的一类新的正交试验法(与极值方法联用的正交试验法),此方法可充分利用一次试验结果获得更多信息,提高试验效率和精度,同时保持正交试验法的传统优点。其次探讨采用正交试验法对各种化学因素影响的大小,并经方差分析和F检验,验证因素效应的显著性。 In this paper, we first introduce a new type of orthogonal test (the orthogonal test method used in conjunction with the extremum method) for the plasma optimization based on the ΔS value of the strontium spectrum. This method can make full use of one test Results Get more information and improve test efficiency and accuracy while maintaining the traditional benefits of orthogonal test methods. Secondly, the influences of various orthogonal test methods on the chemical factors were discussed. The variance analysis and F test were used to verify the significance of the factor effects.