光刻即光化学蚀刻,也叫做化学切削。在未提出这种加工磁头铁芯片的方法之前,多半采用高频电流线切割甚至机械冲切的方法。由于这些方法加工的铁芯片不同程度地存在着内应力或毛刺,影响磁头频率特性和输出幅度的提高。采用光刻则可以克服这些缺点,提高磁头性能。本文将介绍光刻磁头铁芯片的工艺过程,包括照相底图和照相底版的制作、抗蚀图像的形成,化学蚀刻等。 Photolithography is photochemical etching, also known as chemical cutting. Before such a method of processing a magnetic core chip was proposed, a method of high-frequency current wire cutting or even mechanical punching was mostly adopted. Due to the existence of internal stress or burrs on the iron core chips processed by the methods, the frequency characteristic of the magnetic head and the increase of the output amplitude are affected. Photolithography can overcome these shortcomings and improve head performance. This article describes the process of lithography head iron core chip, including the production of photographic base and photographic master, the formation of resist images, chemical etching and so on.