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本文介绍溅射离子真空泵控制电源自动保护功级的几种常规方法 ,重点介绍电源的可能出现的一种罕见故障及其解决的方法
This article describes several general methods for automatically protecting the power levels of sputter ion vacuum pumps and focuses on a rare type of fault that may occur in a power supply and how to deal with it