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本文主要论述了发射光谱仪深度剖面的理论依据和其定量深度剖面分析的理论机制 ,并根据有关理论系统地给出了实现发射光谱仪深度剖面分析的理论模型 ,并指明了理论模型尚待弥补的不足及发展前景。
In this paper, the theoretical basis of the depth profile of the emission spectrometer and the theoretical mechanism of its quantitative depth profile analysis are discussed. The theoretical model of the depth profile analysis of the emission spectrometer is given systematically according to the relevant theory, and the insufficiency of the theoretical model is pointed out And development prospects.