In order to enhance the reliability and stability in RF system, we had researched deeply the problem of Dee voltage-raised and RF power transmission etc. We had done some improvements and researches and made progress in power matching, also given a result of analysis and experiment. The coupling capacitor is a weak part of the RF power transmission at the Dee edge. In order to enhance the reliability and stability in RF system, we had researched deeply the problem of Dee voltage-raised and RF power transmission etc. We had done some improvements and researches and made progress in power matching, also given a result of analysis and The coupling capacitor is a weak part of the RF power transmission at the Dee edge.