PSD精密薄板在线多点测厚系统

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为满足精密薄板厚度在线测量的精密性、实时性和可靠性要求,将基于调制、带通滤波和峰值检测的信号处理技术与激光三角法相结合,设计了高精度PSD微位移传感器,并利用多个传感器和差动三角法制作了采样速率达到1 kHz,测量厚度范围为6 mm,测量精度可达10μm的薄板多点测厚系统原理样机。系统基于SOPC技术,在FPGA内扩展了多个串口作为测量数据传输通道,同时采用ARM9微处理器做控制中心,利用其内部的SMC(静态存储控制器)与FPGA连接,实现了测量数据的实时传输、处理和显示。最后,对系统的稳定性以及影响因素进行了测量和分析。 In order to meet the requirements of precision, real-time and reliability of on-line measurement of precision sheet thickness, a high-precision PSD microdisplacement sensor is designed by combining the signal processing technique based on modulation, band-pass filtering and peak detection with the laser triangulation method, A sensor and differential trigonometry were used to fabricate a prototype of multi-point thickness measurement system with a sampling rate of 1 kHz, a measurement thickness of 6 mm and a measurement accuracy of 10 μm. Based on SOPC technology, the system expands a number of serial ports in the FPGA as measurement data transmission channels. At the same time, it uses the ARM9 microprocessor as a control center and uses its internal SMC (Static Storage Controller) to connect with the FPGA to realize real-time measurement data Transmission, processing and display. Finally, the stability and influencing factors of the system are measured and analyzed.
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