固体表面上的声表面渡(如瑞利波)的发现已有八十多年了,而最近四、五年内才实际应用。目前国外都非常重视这方面的研制工作,制出各种类型的平面化器件,且能适应无线电通信设备小型化、平面集成化的要求。在这些表面波器件中,比较成熟和关键的器件是声表面波延迟线,而且是最基本的一种器件。 It has been more than eighty years since the discovery of surface acoustic waves (such as Rayleigh waves) on solid surfaces, but it has not been applied for the last four or five years. At present, foreign countries attach great importance to the research work in this area and make all kinds of planar devices, and can meet the requirements of miniaturization and planar integration of radio communication devices. Among these surface wave devices, the more mature and the key device is the SAW delay line, and is the most basic kind of device.