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采用与MEMS兼容的工艺,自上而下制作了分级多孔纳米结构的氧化铝/金多层薄膜(HNAGF)电极。利用扫描电子显微镜(SEM)、能量散射谱(EDS)对上述多层薄膜电极结构进行了表征。SEM图像显示底层金层为多孔结构,上层阳极氧化铝层具有有序的多孔的结构特性。以H2O2为探针,通过循环伏安法分别评价了HNAGF电极和传统的裸金薄膜电极的电化学性能。结果表明HNAGF电极不仅对电子传递没有明显障碍,而且对H2O2表现出更好的催化活性和更高的灵敏性。这种新颖的分级多孔纳米薄膜电极将在电流型电化学传感器领域具有广阔的应用前景。
Using a MEMS-compatible process, graded porous nanostructured alumina / gold multi-layer thin film (HNAGF) electrodes were fabricated from top to bottom. The multilayer thin film electrode structure was characterized by scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS). SEM images show that the underlying gold layer is porous and the upper anodic aluminum oxide layer has ordered porous structural features. The electrochemical performance of HNAGF electrode and conventional bare gold electrode were evaluated by cyclic voltammetry using H2O2 as a probe. The results show that HNAGF electrode not only has no obvious obstacle to electron transfer, but also shows better catalytic activity and higher sensitivity to H2O2. This novel graded porous nano-film electrode will have broad application prospects in the field of current electrochemical sensors.