在当今的信息社会中,集成电路工业作为战略性的基础工业,其技术水平和产业规模已成为衡量一个国家经济发展、科技进步和国防实力的重要标志。硅单晶抛光片是微电子技术中最重要的基础功能材料,随着超大规模集成电路集成度的迅速提高,芯片面积增大,线宽越来越细,不仅要求抛光片直 In today’s information society, integrated circuit industry as a strategic basic industry, its technical level and industrial scale have become an important indicator of a country’s economic development, scientific and technological progress and national defense strength. Silicon single crystal polishing sheet is the most important basic functional material in the microelectronics technology. With the rapid increase in the integration degree of VLSI circuits, the chip area increases, the line width becomes finer, and not only the polished sheet is required to be straightened.