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利用热丝化学汽相沉积法生长出优异的金刚石薄膜.研究表明,金刚石的成核依赖于沉积点的尖锐度,薄膜的生长包括晶粒长大和薄膜上的二次成核及其生长,可用分层生长来描述.金刚石晶粒的生长由外延生长和二次成核及其生长组成,也是分层进行的.结果导致了金刚石晶体和薄膜的层状结构.
An excellent diamond thin film was grown by hot wire chemical vapor deposition.The results show that the nucleation of diamond depends on the sharpness of deposition point, the growth of the film includes grain growth and secondary nucleation and growth on the film, Stratified growth to describe. Diamond grain growth by the epitaxial growth and secondary nucleation and growth, but also stratified. The result is a layered structure of diamond crystals and thin films.