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为了研究在氮气中激光的脉冲能量对类金刚石薄膜的微结构组成、表面形貌和红外光学特性的影响,在KrF准分子脉冲激光沉积(PLD)类金刚石薄膜的实验中,在沉积腔中充入10-1Pa氮气并保持其他实验参数不变,脉冲能量分别取120 mJ和150 mJ来沉积类金刚石薄膜。用拉曼光谱仪和X射线光电子能谱仪(XPS)对类金刚石薄膜的微结构与组成进行检测分析;用原子力显微镜(AFM)对薄膜的表面形貌进行检测分析;用傅里叶变换红外光谱仪对类金刚石薄膜和硅衬底的红外光透射谱进行检测分析。实验结果表明,脉冲能量从120 mJ增加到150 mJ导致类金刚石薄膜中的氮含量和sp3键含量增加,C-O,C=O和O的含量减少,石墨晶粒的数量减少、尺寸变小,薄膜表面的粗糙度显著降低。同时,脉冲能量增加导致类金刚石薄膜对红外光的增透作用减弱,增透范围变窄。
In order to study the effect of laser pulse energy on the microstructure, surface morphology and infrared optical properties of diamond-like carbon films in nitrogen, in the experiment of KrF excimer laser pulsed laser deposition (PLD) diamond films, Nitrogen was infused into 10-1Pa and the other experimental parameters were kept unchanged. The diamond-like carbon films were deposited by pulse energy of 120 mJ and 150 mJ, respectively. The microstructure and composition of the diamond-like carbon films were analyzed by Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). The surface morphology of the diamond films was detected by atomic force microscope (AFM). The Fourier transform infrared spectroscopy The diamond-like carbon films and silicon substrates were measured by infrared transmission spectrum. The experimental results show that the increase of pulse energy from 120 mJ to 150 mJ results in the increase of nitrogen and sp3 bond content, the reduction of CO, C = O and O contents, the reduction of the number of graphite grains and the decrease of the size of the films Surface roughness is significantly reduced. At the same time, the increase of pulse energy leads to the weakening effect of DLC film on the penetration of infrared light and the narrowing of the penetration enhancement range.