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移相器是毫米波相控阵雷达收发系统重要电路,基于安捷伦IC-CAP软件及砷化镓原片工艺线,研究了砷化镓毫米波开关器件测试、建模技术及其应用。采用0.15μm GaAs PHEMT工艺成功制作了一款Ka波段5位数控移相器MMIC,对毫米波数控移相器MMIC集成电路的设计、制作过程进行了阐述,并给出了测试结果。电路设计采用了开关滤波拓扑结构,运用微波探针在片测试系统对芯片进行了实测,在34~36 GHz范围内获得了优异的电性能。给出了移相器的测试曲线,32态均方根移相误差(RMS)5°,插入损耗典型值8 dB,输入/输出电压驻波比系数典型值2,芯片尺寸为2.5 mm×1.5 mm×0.1 mm。
The phase shifter is an important circuit of the millimeter-wave phased array radar transceiver system. Based on the Agilent IC-CAP software and the gallium arsenide master chip process line, the testing and modeling techniques and applications of gallium arsenide millimeter-wave switching devices are studied. A 0.15μm GaAs PHEMT process was successfully used to manufacture a Ka-band 5-bit digital phase shifter MMIC. The design and fabrication process of the millimeter-wave digital phase shifter MMIC integrated circuit was described and the test results were given. The circuit design uses a switched-filter topology. The chip is measured in a chip test system using a microwave probe, and excellent electrical performance is achieved in the 34-36 GHz range. The phase shifter test curve is given, with a 32-state root mean square shift error (RMS) of 5 °, a typical insertion loss of 8 dB, a typical input / output VSWR of 2, and a chip size of 2.5 mm × 1.5 mm × 0.1 mm.