一、引言 液态源硼扩散是应用比较普遍的一种扩散方法,典型的作法是采用气体携带法,用N_2把扩散源蒸汽携带到要扩散的样品附近,以实现扩散。此法的优点是适合于大批生产。在平面工艺发展的初期,固态源箱法扩散,在扩散工艺中,曾处于支配地位。它的优点是均匀性、重复性较好;不足之处是由于受扩散箱容积的限制,每次扩散片数不多。液态源气体携带法和固态源箱法各有千秋。我们把二者结合起来,取其所长,形成了一种液态源硼扩散的新方法——大箱法扩散。就是把整个石英管看成是扩散箱,先采用液态源气体携带法,使石英管充分饱和;然后在不通源,只通入保护N_2的情况下,放入样品进行扩散。石英管每饱和一次,可以连续使用4～5小时以上。且具有重复性好,操作简便的优点。在硅平面管生产中,几年来,我们采用这一方法作硼扩散,已取得良好的效果。 I. INTRODUCTION The diffusion of liquid source boron is a common diffusion method. The typical approach is to use gas-carrying method to carry diffusion source steam near the sample to be diffused with N 2 to achieve diffusion. The advantage of this method is suitable for mass production. In the early stages of planar technology, the diffusion of solid-state source boxes was once dominant in diffusion processes. Its advantages are uniformity, better reproducibility; inadequacies due to the volume of the diffusion box limit the number of each diffuser. Liquid source gas carrying method and solid source box method have their advantages and disadvantages. We combine the two, take their director, forming a new method of diffusion of liquid source boron - large box diffusion. The whole quartz tube is regarded as a diffusion box. First, the liquid source gas carrying method is adopted to fully saturate the quartz tube. Then, the sample is diffused into the quartz tube only when the source is not connected and only N 2 is protected. Quartz pipe every time saturated, you can use for 4 to 5 hours or more. And has good repeatability, easy operation advantages. In the production of silicon flat tubes, for several years, we have adopted this method for boron diffusion and have achieved good results.