论文部分内容阅读
最近，纳米技术应用在国内取得新进展，一种将纳米技术成功应用于压力传感器的科技创新产品——电阻应变式纳米压力传感器研制成功。 据称，该产品采用低能离子束轰击原子搬迁技术形成纳米量级厚度的Ni-Cr功能薄膜、SiO2钝化层薄膜、Ta2O2过渡层薄膜以及起隔离作用的SiO2薄膜，
Recently, the application of nanotechnology in the country made new progress, a successful application of nano-technology to pressure sensor technology innovation products - resistance strain-type nano-pressure sensor successfully developed. Allegedly, the product uses a low-energy ion beam bombardment atomic displacement technology to form a nano-scale thickness of the Ni-Cr functional film, SiO2 passivation layer film, Ta2O2 transition layer film and the isolation of SiO2 film,