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用原子力显微镜、紫外-可见分光光度计和荧光光谱仪观察采用溶胶-凝胶法制备的Al掺杂ZnO薄膜的表面形貌、透射光谱和光致发光谱。结果表明,Al掺杂量为0.5at%的ZnO薄膜经550℃退火处理后,粗糙度为1.817,Al掺杂量为1.0at%的ZnO薄膜经600℃退火处理后,粗糙度增大到4.625。样品在可见光范围内的平均透过率均大于80%。当激发波长为325 nm时,在397 nm(3.13 eV)附近出现紫外发光峰;当激发波长为360 nm时,在443 nm(2.80 eV)附近出现蓝色发光峰。探讨了样品的蓝光发光机制。
The surface morphology, transmission spectra and photoluminescence spectra of Al-doped ZnO thin films prepared by sol-gel method were observed with atomic force microscopy, UV-visible spectrophotometer and fluorescence spectrometer. The results show that the ZnO thin films with 0.5at% Al doping amount annealed at 550 ℃ have a roughness of 1.817 and a 1.0at% Al doping amount annealed at 600 ℃, and the roughness increases to 4.625 . The average transmittance of the sample in the visible range is greater than 80%. When the excitation wavelength is 325 nm, the UV emission peak appears near 397 nm (3.13 eV). When the excitation wavelength is 360 nm, the blue emission peak appears near 443 nm (2.80 eV). The blue luminescence mechanism of the sample was discussed.