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太赫兹频段缺少有效的有源器件模型是制约硅基太赫兹集成电路快速发展主要阻碍。介绍了微环谐振器的工作原理及分析方法,研究了耦合系数和损耗系数与微环传输特性的关系,使用硅基材料设计了一种串联三微环结构的硅基太赫兹谐振器模型,通过改变微环的传输损耗系数、耦合系数,运用有限差分数值计算方法模拟得到微环谱线和延迟特性曲线,分析其对传输特性的影响,优化微环谐振器的参数设计,得到高性能的硅基太赫兹集成器件。
The absence of an effective active device model in the THz band is a major hurdle to limiting the rapid development of silicon-based terahertz integrated circuits. The working principle and analysis method of the micro-ring resonator are introduced. The relationship between the coupling coefficient and the loss coefficient and the transmission characteristics of the micro-ring is studied. A silicon-based terahertz resonator model with a series of three- By changing the transmission loss coefficient and the coupling coefficient of the microring, the microcyclic line and the delay characteristic curve were simulated by using the finite difference numerical calculation method, the influence on the transmission characteristic was analyzed, the parameter design of the microring resonator was optimized, and the high performance Silicon-based terahertz integrated device.