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使用划痕仪对多弧离子镀制备的TiN/TiCrN/TiCrAlN复合薄膜进行了划痕实验,结合金相显微镜观察分析划痕表面形貌,综合判定了该复合薄膜的膜基结合力。结果表明,该薄膜的失效形式为周边剥落;单一的声信号曲线不能准确判定薄膜失效的临界载荷,需要声信号曲线与划痕形貌的综合判定。
The scratch test was carried out on the TiN / TiCrN / TiCrAlN composite films prepared by multi-arc ion plating using a scratch tester. The surface morphology of the scratches was observed by metallographic microscope and the film-based adhesion of the composite films was evaluated. The results show that the failure mode of the film is peeled off in the periphery. The single acoustic signal curve can not accurately determine the critical load of the film failure, and the comprehensive determination of acoustic signal curve and scratch morphology is needed.